Tropel interferometer can perform measurements of slices up to 200 mm with a 50 nm accuracy:
Slice specification: transparent or semi-opaque, polished or not, up to several millimetres thick. The software offers numerous raw data processing types to highlight relevant information.
Measurements on round wafers 2 to 6 in
Altisurf 520 can perform surface texture and flatness metrology.
This profilometer can perform measurements using several technologies: chromatic confocal, white light interferometry, both associated with a high-resolution CCD camera.
An optional double rotary axis can be added to this metrology station to address the different needs.
Altimet 520. Optical geometric and dimensional measurements
Table X-Y 200x200mm
Accuracy: flatness 0.3 µm, Ra down to 3 nm
The IM-7000 Series (Instant Measurement System) profile measurement system is an automatic 2D measuring machine combining high accuracy and ease-of-use.
The orientation of the cut crystalline samples can be verified with an X-ray goniometer using Bragg’s law. The absolute accuracy range is one minute of angle, but the measurement repeatability is of 10 arc seconds.
Fondée en 2011 par un partenariat entre industriels et laboratoires d’Auvergne-Rhône-Alpes. Pilotée par l’Université Claude Bernard Lyon 1. Dotée d’une gouvernance collégiale. Inscrite dans l’écosystème d’innovation régional. Soutenue par les collectivités territoriales.
Founded in 2011 by a partnership between industrial manufacturers and laboratories from Auvergne-Rhône-Alpes region.
354 Voie Magellan -
Bât. Cleanspace
Parc d’activité Alpespace
Sainte-Hélène-du-Lac 73800 France
+33 (0)619 23 40 56
EZUS LYON Université Claude Bernard Lyon 1 L’Atrium - CS 32009 Villeurbanne cedex 69616 France